Etching mechanism of barium strontium titanate (BST) thin films in CHF3/Ar plasma
نویسندگان
چکیده
منابع مشابه
Synthesis and characterization of Barium Strontium Titanate (BST) micro/nanostructures prepared by improved methods
Nowadays various methods are presented for synthesis of barium strontium titanate (BST) nanopowders with different morphology and properties. Each of these (BST)s has got individual characterization that makes it suitable for a special application. Every method has a special quality, causes it to have preference over the other methods. Low processing temperature is a desired point which most of...
متن کاملSynthesis and characterization of Barium Strontium Titanate (BST) micro/nanostructures prepared by improved methods
Nowadays various methods are presented for synthesis of barium strontium titanate (BST) nanopowders with different morphology and properties. Each of these (BST)s has got individual characterization that makes it suitable for a special application. Every method has a special quality, causes it to have preference over the other methods. Low processing temperature is a desired point which most of...
متن کاملHigh tunability in compositionally graded epitaxial barium strontium titanate thin films by pulsed-laser deposition
Compositionally graded barium strontium titanate @(BaxSr12x)TiO3—BST, x50.75, 0.8, 0.9, and 1.0# thin films are fabricated by pulsed-laser deposition on a LaAlO3 substrate with (La0.7Sr0.3)MnO3 as the bottom electrode. A high dielectric permittivity and temperature characteristic without Curie–Weiss law are obtained. A tunability of over 70% is obtained at frequency of 1 MHz, which is higher th...
متن کاملThe effect of stress on the dielectric properties of barium strontium titanate thin films
Barium strontium titanate thin films are being developed as capacitors in dynamic random access memories. These films, grown on silicon substrates, are under tensile residual stress. By a converse electrostrictive effect, the in-plane tensile stress reduces the capacitance in the thickness direction of the film. We measured the substrate curvature change upon the removal of the film, and found ...
متن کاملRealization of high tunability barium strontium titanate thin films by rf magnetron sputtering
Ferroelectric thin films are currently being used to develop tunable microwave circuits based on the electric-field dependence of the dielectric constant. (Ba0.5Sr0.5)TiO3 ~BST! films prepared by sputtering on Pt/TiO2 /SiO2 /Si substrates are found to exhibit a capacitance change ~tunability! of nearly 4:1. Higher tunability has been attributed to the ~100! texturing of the BST films and is a r...
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ژورنال
عنوان ژورنال: Chinese Science Bulletin
سال: 2011
ISSN: 1001-6538,1861-9541
DOI: 10.1007/s11434-011-4561-5